The new IR820 robot and controller is designed for automated processes that require exceptional accuracy, reliability, and ultra-cleanliness.

The product is ideally suited for silicon wafer handling in semiconductor fabrication plants as well as certain processes such as small flat panel applications and hard disk production.

The IR820 robot is the second generation of the IR800 line, which features four independent and coordinated axes, with a fifth axis optional. The IR820 is available with various arm lengths. The four or more degrees of freedom and configurable reach allow it to manage a wide variety of tasks, including multiple in-line cassettes applications for 300 mm wafers.

The IR820 features a new state-of-the-art servo amplifier and controller. Each of the robot's three principle rotary joints has a 640-degree range of motion, allowing for flexibility of robot placement and very efficient trajectories. The robot has tested to the highest cleanliness standards. Software features include sophisticated trajectory planning and "streaming motion" that automatically blends programmed motions, yielding safe, smooth and fast throughput. Blended motion commands can seamlessly integrate motion with application-specific I/O.

Specifications

• Repeatability: ±0.05mm.
• Payload: 2.2kg at wrist
• ISO Class 1 capable
  

Typical Applications

• Semiconductor wafer handling
• Small substrate glass handling (flat panel display, reticle etc)
• Rigid or hard disk manufacturing
  
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